18th European FIB Users Group Meeting (EFUG2014)
Program and presentations
Tuesday 30th September 2014, Berlin, Germany.

Presentations - Conference session

The conference contributions are published in Microelectronics Reliability 54 (2014). Proceedings ESREF2014.

Precise Nanofabrication with Multiple Ion Beams for Advanced Circuit Edit, (invited)
Huimeng Wu, David Ferranti, Lewis Stern. Carl Zeiss LLC, Peabody MA, USA
Microelectron. Rel. 54 1779-1784 (2014).
Advanced FIB sample preparation techniques for high resolution TEM investigations of HEMT structures
M. Simon-Najasek, S. Huebner, F. Altmann, A. Graff. Fraunhofer Institute Mechanics of Materials, Halle, Germany
Microelectron. Rel. 54 1785-1789 (2014).
Local thickness and composition analysis of TEM lamellas in the FIB
C. Lang, M. Hiscock, M. Dawson, C. Hartfield. Oxford Instruments NanoAnalysis, High Wycombe, UK
Microelectron. Rel. 54 1790-1793 (2014).
Efficient and flexible Focused Ion Beam micromachining of Solid Immersion Lenses in various bulk semiconductor materials - an adaptive calibration algorithm
P. Scholz, N. Herfurth, M. Sadowski, T. Lundquist, U. Kerst, C. Boit. TUBerlin, Berlin, Germany
Microelectron. Rel. 54 1794-1797 (2014).
Focused ion beam contact to non-volatile memory cells
Clemens Helfmeier, R. Schlangen, C. Boit. TUBerlin, Berlin, Germany
Microelectron. Rel. 54 1798-1801 (2014).

Problems and solutions when using FIB to prep nanostructures for TEM
Filip Lenrick, Lund University
Presentation
TEM Sample Preparation by Xe Plasma FIB
M. Viteau et al. OrsayPhysics
Maximizing Circuit Edit Efficiency by Adding Nanoprobing Capability
Andreas Rummel et al, Kleindiek
Extending Dualbeam Applications with the Helios PFIB
David Donnet, FEI
Presentation

Low temperature FIB cross section: example on indium micro bumps
L. Dantas de Morais, S. Chevalliez, S. Mouleres
Microelectron. Rel. 54 1802-1805 (2014).
Cross sectional sample preparation of nanowires for TEM analysis using FIB
Filip Lenrick, Lund University
The pyramids inner secrets, FIB preparation of nano structures for TEM
Filip Lenrick, Lund University