Literature on Focused Ion Beam

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• High Resolution Focused Ion Beams, FIB and Its Applications
  J. Orloff, M. Utlaut and L. Swanson
  Kluwer Academic / Plenum Publishers (2003)
  
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• Introduction to Focused Ion Beams - Instrumentation, Theory, Techniques and Practice
  Ed. L.A. Giannuzzi, F.A. Stevie,
  ISBN 0-387-23116-1, Springer (2005)
  
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• Focused Ion Beam Systems, Basics and Applications
  Ed. Nan Yao
  Cambridge University Press (2007)
  
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• Handbook of Charged Particle Optics, 2nd Edition
  Ed. Jon Orloff
  Chapter 11, "Focused Ion Beam", M. Utlaut
  ISBN 9781420045543, CRC Press (2008)
  
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• Recent Advances in Nanofabrication Techniques and Applications
  Ed. Bo Cui
  Chapter 2, "Focused Ion Beam Lithography", H.D. Wanzenboeck and S. Waid
  InTech (2011)
  
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• Nanofabrication Using Focused Ion and Electron Beams, Principles and Applications
  Ed. I. Utke, S. Moshkalev and P. Russell
  Oxford University Press (2012)
  
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• Introduction to Focused Ion Beam Nanometrology
  David C. Cox
  Morgan & Claypool Publishers (2013)

• FIB literature list